Journal: Nanophotonics
Article Title: An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation
doi: 10.1515/nanoph-2021-0754
Figure Lengend Snippet: Experimental results of the sensor. (a) SEM image of fabricated slot antennas and scattering grating. Inset: Magnified SEM image of the antenna pair. (b) Schematic of the experimental setup. (c) CCD image of the antenna pair and diffraction grating under the illumination of an x -polarized supercontinuum light laser. (d) Output spectra (dots) and the corresponding polynomial fittings (lines) for different x 0 values. (e) Extinction wavelength versus the displacement. The line presents the linear fitting. Inset: Extinction wavelength and measurement uncertainty versus the displacement.
Article Snippet: An x -polarized supercontinuum laser beam (SC-5, YSL Photonics, China) was focused using an oil-immersion objective (100×, NA = 1.4) and normally illuminated upon the antenna pair from the silica substrate along the + z -axis.
Techniques: